Chemical characterization of III–V heterostructures in 3D architecture

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http://hal.univ-grenoble-alpes.fr/hal-01991881
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Submitted on : Thursday, January 24, 2019 - 10:31:40 AM
Last modification on : Tuesday, July 23, 2019 - 11:16:04 AM

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V. Gorbenko, A. Grenier, G. Audoit, R. Cipro, M. Martin, et al.. Chemical characterization of III–V heterostructures in 3D architecture. Microelectronic Engineering, Elsevier, 2015, 147, pp.219-222. ⟨10.1016/j.mee.2015.04.107⟩. ⟨hal-01991881⟩

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