This paper compares several de-embedding methods over millimeter and sub-millimeter wave frequen-cies in integrated technology. These methods are compared for S-CPW transmission lines considered as device under test. From these comparisons we propose an effective way to de-embed transmission lines. A method called "Half-Thru de-embedding method" is especially discussed. The SCPW transmission line model and results are obtained from Ansys HFSS Simulations in BiCMOS 55-nm integrat-ed technology.